Low-cost mass flow controller MC-10RC series
A mass flow controller developed for analysis devices and various film deposition equipment, which is low-cost yet equipped with basic performance. It contributes to the improvement of semiconductor manufacturing costs.
The MC-10 series mass flow controller for gases is a low-cost model that can contribute to improving semiconductor manufacturing costs through short delivery times. It achieves low pricing by utilizing solenoid actuators and rubber seals. 【Features】 - Achieves low pricing by adopting rubber seals - Guarantees flow accuracy of ±1.0% F.S. - Supports a wide flow range - With the optional variable range function, it can accommodate multiple specifications with a single unit (gas type, F.S., and flow can be changed) - Stable operation even in environments with high-frequency noise and direct current magnetic fields, thanks to the use of a metal case and various filters *For other functions and details, please download the PDF.
- Company:リンテック 東京営業所
- Price:10,000 yen-100,000 yen